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Remote plasma cleaning is a proven method used by several electron microscopists to get the most ideal images from their instruments by removing hydrocarbon (HC) contamination 1. The oxygen radicals ...

Compact electron probes with large beam currents are required to achieve such precision. Routine production at the nanoscale requires immaculate and regulated surfaces to get the appropriate ...

The oxygen radicals produced in the plasma generate CO, CO 2, and H 2 O by reacting with carbon compounds, and these generated byproducts are eliminated from the instrument. As per quantum chemistry ...